Combinatorial Thin Film Synthesis for Developments of New High Dielectric Constant Thin Film Materials-Reference-Cited by-同舟云学术

Combinatorial Thin Film Synthesis for Developments of New High Dielectric Constant Thin Film Materials

Published:2018-10-01 Issue:5 Volume:43 Page:249-254
ISSN:1382-3469
Container-title:Transactions of the Materials Research Society of Japan
language:en
Short-container-title:Trans. Mat. Res. Soc. Japan

Author:

Nagata Takahiro¹²,Kumaragurubaran Somu¹,Suzuki Yoshihisa¹³,Takahashia Kenichiro¹⁴,Ri Sung-Gi¹⁴,Tsunekawa Yoshifumi¹⁴,Suzuki Setsu¹⁴,Chikyow Toyohiro¹⁵

Affiliation:

1. International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS)

2. JST-PRESTO

3. Meiji University

4. COMET Inc.

5. Materials Data & Integrated System (MaDIS), NIMS

Publisher

The Materials Research Society of Japan

Link

https://www.jstage.jst.go.jp/article/tmrsj/43/5/43_249/_pdf

Reference34 articles.

1. [1] P. G. Neudeck, D. J. Spry, L.Y. Chen, G. M. Beheim, R. S. Okojie, C. W. Chang, R. D. Meredith, T. L. Ferrier, L. J. Evans, M. J. Krasowski, and N. F. Prokop, IEEE Electron Dev. Lett. 29, 456 (2008).

2. [2] P. G. Neudeck, D. J. Spry, L.-Y. Chen, C. W. Chang, G. M. Beheim, R. S. Okojie, L. J. Evans, R. D. Meredith, T. L. Ferrier, M. J. Krasowski, and N. F. Prokop, Mater. Sci. Forum. 615-617, 929 (2009).

3. [3] B. J. Baliga, Semicond. Sci. Technol. 28, 074011 (2013).

4. [4] Z. Xu, J. Wang, Y. Cai, J. Liu, Z. Yang, X. Li, M. Wang, M. Yu, B. Xie, W. Wu, X. Ma, J. Zhang, and Y. Hao, IEEE Electron Dev. Lett.35, 33 (2014).

5. [5] M. Higashiwaki, K. Sasaki, A. Kuramata, T. Masui, and S. Yamakoshi, Phys. Status Solidi A 211, 21-26 (2014).

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