Author:
Ivanov B. V.,Ananyev S. S.,Bobyr N. P.
Reference93 articles.
1. B. V. Ivanov and S. S. Anan’ev, Vopr. At. Nauki Tekh., Ser. Termoyad. Sintez 44 (4), 5 (2021). https://doi.org/10.21517/0202-3822-2021-44-4-5-24
2. B. V. Ivanov and S. S. Anan’ev, Vopr. At. Nauki Tekh., Ser. Termoyad. Sintez 45 (4), 120 (2022). https://doi.org/10.21517/0202-3822-2022-45-4-120-135
3. C. Day and T. Giegerich, IEEE Trans. Plasma Sci. 42, 1058 (2014). https://doi.org/10.1109/TPS.2014.2307435
4. High-Vacuum Turbomolecular Pump VEGA PROvac 1500, 2023. https://vcmo33.ru/pumps/vega-provac-1500.
5. ND-1000. Diffusion High Vacuum Pump, 2023. https://vacma.ru/catalog/vakuumnye-nasosy/vysokovakuumnye-nasosy/diffuzionnye/nasosy-nd/nasos-nd-1000.