Investigation of the Discharge Chamber Expansion Region Influence on the Electron Density in an Inductively Coupled RF Discharge
-
Published:2023-09-08
Issue:S1
Volume:57
Page:S227-S233
-
ISSN:0018-1439
-
Container-title:High Energy Chemistry
-
language:en
-
Short-container-title:High Energy Chem
Author:
Shemakhin A. Y.,Zheltukhin V. S.,Kiselev G. B.,Terentev T. N.
Publisher
Pleiades Publishing Ltd
Subject
Physical and Theoretical Chemistry
Reference25 articles.
1. Xia, Z., Chen, A.I., Saifutdinov, S., and Eliseev, Y.Hu., Kudryavtsev, IEEE Trans. Plasma Sci., 2014, vol. 42, p. 2768. 2. Saifutdinov, A. Kustova, E., Karpenko, A., and Lashkov, V., Plasma. Phys. Rep., 2019, vol. 45, p. 602. 3. Timerkaev, B., Amirzyanov, D., and Israfilov, D., J. Phys.: Conf. Ser., 2016, vol. 669, p. 012063. 4. Yuan, C., Kudryavtsev, A., Saifutdinov, A., Sysoev, S., Stefanova, M., Pramatarov, P., and Zhou, Z., Phys. Plasmas, 2018, vol. 25, p. 104501. 5. Chen, Z., Xia, G., Zou, C., Li., P., Hu, Y., Ye., Q., Eliseev, S., Stepanova, O., Saifutdinov, A., Kudryavtsev, A., et al., J. Appl. Phys., 2015, vol. 118, p. 023307.
|
|