Influence of the Substrate Roughness on the Accuracy of Measuring the Impurity Depth Distribution by Secondary-Ion Mass Spectrometry
Author:
Publisher
Pleiades Publishing Ltd
Subject
Surfaces, Coatings and Films
Link
https://link.springer.com/content/pdf/10.1134/S1027451021060094.pdf
Reference17 articles.
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3. F. Konusov, S. Pavlov, A. Lauk, V. Tarbokov, S. Karpov, V. Karpov, R. Gadirov, E. Kashkarov, and G. Remnev, Surf. Coat. Technol. 389, 125564 (2020). https://doi.org/10.1016/j.surfcoat.2020.125564
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