Effect of the Nanoscale Surface Relief on the Sputtering of Amorphous Carbon-Reference-Cited by-同舟云学术

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Effect of the Nanoscale Surface Relief on the Sputtering of Amorphous Carbon

Published:2020-11 Issue:6 Volume:14 Page:1346-1351
ISSN:1027-4510
Container-title:Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Shulga V. I.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451020060440.pdf

Reference20 articles.

1. G. Carter, J. Appl. Phys. 85 455 (1999). https://doi.org/10.1063/1.369408

2. D. P. Adams, M. J. Vasile, T. M. Mayer, and V. C. Hodges, J. Vac. Sci. Technol. 21, 2334 (2003). https://doi.org/10.1116/1.1619421

3. D. P. Adams, T. M. Mayer, M. J. Vasile, and K. Archuleta, Appl. Surf. Sci. 252, 2432 (2006). https://doi.org/10.1016/j.apsusc.2005.06.013

4. N. N. Andrianova, A. M. Borisov, and E. S. Mashkova, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 3, 322 (2009).

5. K. Takahiro, K. Ozaki, K. Kawatsura, et al., Appl. Surf. Sci. 256, 972 (2009). https://doi.org/10.1016/j.apsusc.2009.05.103

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3. Effect of deformation nanostructuring on ion-beam erosion of copper;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2024-03-15

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