Author:
Kolodko D. V.,Kaziev A. V.,Ageichenkov D. G.,Lisenkov V. Yu.
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Radiation,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Handbook of Thin Film Deposition, Eds K. Seshan, D. Schepis, 4th ed. (Elsevier, Amsterdam, 2018).
2. D. M. Mattox, Handbook of Physical Vapor Deposition (PVD) Processing (Elsevier, Amsterdam, 2010).
3. S. K. Aghda, D. M. Holzapfel, D. Music, et al., Acta Mater. 250, 118864 (2023).
4. G. Greczynski, I. Petrov, J. E. Greene, et al., J. Vac. Sci. Technol. Am. Vacuum Soc. 37, 060801 (2019).
5. K. Ellmer and T. Welzel, J. Mater. Res. 27, 765 (2012).