Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Cited by
46 articles.
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1. Anisotropy of sapphire single crystal sputtering;Journal of Experimental and Theoretical Physics;2015-08
2. Net sputtering rate due to hot ions in a Ne-Xe discharge gas bombarding an MgO layer;Journal of Applied Physics;2011-04-15
3. Sputtering in a glow discharge lamp of the Grimm type;The European Physical Journal Applied Physics;2003-02-27
4. Trends in sputtering;Progress in Surface Science;2000-05
5. Model for large cluster emission in ion sputtering of metals applied to atomic and polyatomic ion bombardments;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-09