Step Edge Sputtering Yield at Grazing Incidence Ion Bombardment
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.92.246106/fulltext
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1. Preparation by glancing incidence ion irradiation of surfaces with ångstrom-scale RMS roughness
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