Oriented thick films of block copolymer made by multiple successive coatings: perforated lamellae versus oriented lamellae
Author:
Affiliation:
1. Université Paris-Saclay
2. CEA
3. CNRS
4. NIMBE
5. Lions
6. LETI
7. Minatec
8. Grenoble Cedex 9
9. France
10. Synchrotron SOLEIL
11. L’Orme des Merisiers
12. Saint-Aubin
13. F-91192 Gif-sur-Yvette Cedex
Abstract
Layer by layer fabrication of lamellar perforated phases on top of substrates.
Funder
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Publisher
Royal Society of Chemistry (RSC)
Subject
Condensed Matter Physics,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2020/SM/D0SM00603C
Reference74 articles.
1. Theory of Microphase Separation in Block Copolymers
2. Block Copolymer Based Nanostructures: Materials, Processes, and Applications to Electronics
3. Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist
4. Directed Assembly of Lamellae Forming Block Copolymer Thin Films near the Order–Disorder Transition
5. Assembly of aligned linear metallic patterns on silicon
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