1. Key Laboratory for Thin Film and Microfabrication of the Ministry of Education
2. Department of Micro/Nano Electronics
3. School of Electronics, Information and Electrical Engineering
4. Shanghai Jiao Tong University
5. Shanghai 200240
6. State Key Lab of Transducer Technology
7. Shanghai Institute of Microsystem and Information Technology
8. Chinese Academy of Sciences
9. Shanghai 200050
10. China