1. Laser Institute, Qilu University of Technology (Shandong Academy of Sciences), Jinan, Shandong, 250014, China
2. Shanxi Key Laboratory of Advanced Semiconductor Optoelectronic Devices and Integrated Systems, Jincheng, Shanxi, 048000, China
3. Jincheng Research Institute of Opo-mechatronics Industry, Jincheng, Shanxi, 048000, China
4. Centre for Advanced Laser Manufacturing (CALM), School of Mechanical Engineering, Shandong University of Technology, Zibo, Shandong, China