High Quality 3D Photonics using Nano Imprint Lithography of Fast Sol-gel Materials
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/s41598-018-26261-3.pdf
Reference28 articles.
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3. Kawata, S., Sun, H. B., Tanaka, T. & Takada, K. Finer features for functional microdevices. Nature 412, 697–698 (2001).
4. Deubel, M. et al. Direct laser writing of three-dimensional photonic-crystal templates for telecommunications. Nat. Mater. 3, 444–7 (2004).
5. Fischer, J., Von Freymann, G. & Wegener, M. The materials challenge in diffraction-unlimited dired-laser-writing optical lithography. Adv. Mater. 22, 3578–3582 (2010).
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