Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/s41598-017-01472-2.pdf
Reference71 articles.
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3. Morrison, D. T. & Robertson, T. RF sputtering of plastics. Thin Solid Films 15, 87–101, doi: 10.1016/j.jhazmat.2008.01.065 (1973).
4. Biederman, H., Bílková, P., Ježek, J., Hlídek, P. & Slavínská, D. RF magnetron sputtering of polymers. J. Non-Cryst. Solids 218, 44–49, doi: 10.1016/S0022-3093(97)00196-8 (1997).
5. Biederman, H. & Slavı́nská, D. Plasma polymer films and their future prospects. Surf. Coat. Technol. 125, 371–376, doi: 10.1016/S0257-8972(99)00578-2 (2000).
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