Planar Microsupercapacitors Based on Oblique Angle Deposited Highly Porous TiN Thin Films
Author:
Affiliation:
1. Nanoscience Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247667, India
Funder
Department of Science and Technology, Ministry of Science and Technology, India
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.2c03213
Reference42 articles.
1. Microsupercapacitors as miniaturized energy-storage components for on-chip electronics
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4. Materials for electrochemical capacitors
5. All-Solid-State Lithium-Ion Microbatteries: A Review of Various Three-Dimensional Concepts
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