High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature-Reference-Cited by-同舟云学术

High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature

Published:2023-09-21 Issue:10 Volume:10 Page:3748-3754
ISSN:2330-4022
Container-title:ACS Photonics
language:en
Short-container-title:ACS Photonics

Author:

Lopez-Rodriguez Bruno¹^ORCID,van der Kolk Roald²,Aggarwal Samarth³^ORCID,Sharma Naresh¹,Li Zizheng¹,van der Plaats Daniel¹,Scholte Thomas¹,Chang Jin⁴^ORCID,Gröblacher Simon⁴^ORCID,Pereira Silvania F.¹,Bhaskaran Harish³^ORCID,Zadeh Iman Esmaeil¹^ORCID

Affiliation:

1. Department of Imaging Physics (ImPhys), Faculty of Applied Sciences, Delft University of Technology, Delft 2628 CJ, The Netherlands

2. Kavli Institute of Nanoscience, Delft University of Technology, Delft 2628 CD, The Netherlands

3. Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K.

4. Department of Quantum Nanoscience, Faculty of Applied Sciences, Delft University of Technology, Delft 2628 CJ, The Netherlands

Funder

Nederlandse Organisatie voor Wetenschappelijk Onderzoek

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsphotonics.3c00968

Reference49 articles.

1. Perspective on the future of silicon photonics and electronics

2. Silicon nitride passive and active photonic integrated circuits: trends and prospects

3. Aluminium nitride integrated photonics: a review

4. Accurate measurements of second-order nonlinear optical coefficients of 6H and 4H silicon carbide

5. 4H-SiC microring resonators for nonlinear integrated photonics

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