MEMS-Enabled On-Chip Computational Mid-Infrared Spectrometer Using Silicon Photonics-Reference-Cited by-同舟云学术

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MEMS-Enabled On-Chip Computational Mid-Infrared Spectrometer Using Silicon Photonics

Published:2022-06-23 Issue:7 Volume:9 Page:2367-2377
ISSN:2330-4022
Container-title:ACS Photonics
language:en
Short-container-title:ACS Photonics

Author:

Qiao Qifeng¹²,Liu Xinmiao¹³²,Ren Zhihao³²,Dong Bowei³²,Xia Ji¹,Sun Haoyang¹,Lee Chengkuo³²^ORCID,Zhou Guangya¹²^ORCID

Affiliation:

1. Department of Mechanical Engineering, National University of Singapore, Singapore 117575, Singapore

2. Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore

3. Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore

Funder

Ministry of Education - Singapore

Publisher

American Chemical Society (ACS)

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Biotechnology,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acsphotonics.2c00381

Reference41 articles.

1. Near-infrared spectroscopy and hyperspectral imaging: non-destructive analysis of biological materials

2. Miniaturization of optical spectrometers

3. MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range

4. MEMS-based microspectrometer technologies for NIR and MIR wavelengths

5. Malinen, J.; Rissanen, A.; Saari, H.; Karioja, P.; Karppinen, M.; Aalto, T.; Tukkiniemi, K. Advances in Miniature Spectrometer and Sensor Development; Next-Generation Spectroscopic Technologies VII, International Society for Optics and Photonics, 2014; p 91010C.

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