1. State Key Laboratory of Silicon Materials & School of Materials Science and Engineering, Zhejiang University, Hangzhou, Zhejiang310027, China
2. Institute of Advanced Semiconductors & Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, Hangzhou Innovation Center, Zhejiang University, Hangzhou, Zhejiang311215, China
3. Zhejiang Province Key Laboratory of Quantum Technology and Device & Department of Physics, Zhejiang University, Hangzhou, Zhejiang310027, China
4. Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
5. School of Materials Science and Engineering & College of Chemistry, Zhengzhou University, Zhengzhou, Henan450001, China