1. Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu 30078, Taiwan
2. Department of Industrial Safety
and Health, Hung-Kuang University, Taichung
43302, Taiwan
3. Department
of Chemical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
4. Department of Applied Chemistry
and Materials Science, Chung Cheng Institute of Technology, National Defense University, Taoyuan 33448, Taiwan