1. Institute of Particle Technology, Friedrich-Alexander-Universität Erlangen-Nürnberg, Cauerstr. 4, 91058 Erlangen, Germany
2. Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Friedrich-Alexander-Universität Erlangen-Nürnberg, Interdisciplinary Center for Nanostructured Films (IZNF), Cauerstr. 3, 91058 Erlangen, Germany