Extreme Ultraviolet Photoresponse of Organotin-Based Photoresists with Borate Counteranions-Reference-Cited by-同舟云学术

Extreme Ultraviolet Photoresponse of Organotin-Based Photoresists with Borate Counteranions

Published:2024-08-05 Issue:32 Volume:16 Page:42947-42956
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Evrard Quentin¹²^ORCID,Sadegh Najmeh¹,Mathew Simon²^ORCID,Zuidinga Ed²,Watts Benjamin³,Paradiz Dominguez Maximilian²,Giglia Angelo⁴^ORCID,Mahne Nicola⁴,Nannarone Stefano⁴,Nishimura Akira⁵,Goya Tsuyoshi⁵,Sugioka Takuo⁵,Vockenhuber Michaela³,Ekinci Yasin³^ORCID,Brouwer Albert M.¹²^ORCID

Affiliation:

1. Advanced Research Center for Nanolithography ARCNL, Science Park 106, 1098 XG Amsterdam, The Netherlands

2. van’t Hoff Institute for Molecular Sciences, University of Amsterdam, P.O. Box 94157, 1090 GD Amsterdam, The Netherlands

3. Paul Scherrer Institute, Forschungsstrasse 111, 5232 Villigen PSI, Switzerland

4. CNR-IOM─Istituto Officina dei Materiali, National Research Council of Italy, Strada Statale 14 km 163, 5, Basovizza, Trieste 34149, Italy

5. Nippon Shokubai, 5-8 Nishi Otabi-cho, Suita, Osaka 564-0034, Japan

Funder

H2020 Marie Sklodowska-Curie Actions

Nippon Shokubai

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.4c08636

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