1. Department of Physics and Earth Sciences, University of Ferrara, via Giuseppe Saragat 1, Ferrara 44122, Italy
2. MNF-Micro Nano Facility Sensors and Devices Center, Bruno Kessler Foundation, via Sommarive 18, Trento 38123, Italy
3. Sensing Technologies Lab, Faculty of Science and Technology, Free University of Bozen-Bolzano, piazza Università 1, Bolzano 39100, Italy
4. National Research Council, Institute for Microelectronics and Microsystems, via Gobetti 101, Bologna 40129, Italy
5. Cimprogetti S.r.l. Lime Technologies, via Pasubio, Bergamo 24044, Italy