Controlled Orientation of Silicon-Containing Diblock Copolymer Thin Films by Substrate Functionalization Under Vacuum
Author:
Affiliation:
1. Department of Chemical Engineering, National Tsing Hua University, Hsinchu30013, Taiwan
2. Department of Materials Science Engineering, University of Ioannina, University Campus, Ioannina45110, Greece
Funder
Ministry of Science and Technology, Taiwan
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.macromol.2c01765
Reference49 articles.
1. Enabling nanotechnology with self assembled block copolymer patterns
2. Block Copolymer Lithography
3. Block Copolymer Thermodynamics: Theory and Experiment
4. Dynamic Thermal Field-Induced Gradient Soft-Shear for Highly Oriented Block Copolymer Thin Films
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