1. Łukasiewicz Research Network─PORT Polish Center for Technology Development, Stabłowicka 147, 54-066 Wrocław, Poland
2. Faculty of Physics and Astronomy, Institute of Experimental Physics, University of Wrocław, Maksa Borna 9, 50-204 Wrocław, Poland
3. Institute of Low Temperature and Structure Research, Polish Academy of Sciences, Okólna 2, 50-422 Wrocław, Poland
4. Department of Semiconductor Materials Engineering, Wrocław University of Science and Technology, Wyb. Wyspiańskiego 27, 50-370 Wrocław, Poland
5. Department of Nanometrology, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
6. Łukasiewicz Research Network─Institute of Microelectronics and Photonics, Lotników 32/46, 02-668 Warsaw, Poland