1. Key Laboratory of Nonferrous Materials and New Processing Technology, Guangxi Key Laboratory of Optical and Electronic Materials and Devices, Ministry of Education, College of Materials Science and Engineering, Guilin University of Technology, Guilin 541004, China
2. National Key Laboratory of Materials for Integrated Circuits, Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China