1. School of Mechanical Engineering, Beijing Institute of Technology, No. 5 Zhongguancun South Street, Haidian District, Beijing 100081, P. R. China
2. State Key Laboratory of Ultra-precision Machining Technology, The Hong Kong Polytechnic University, Hong Kong 999077, P. R. China
3. College of Mechanical and Electronic Engineering, Northwest A&F University, No. 3 Taicheng Road, Yangling 712100, P. R. China
4. Phenix Optics Co., Ltd., No. 197, W Phenix Road, Shangrao, Jiangxi Province 334000, P. R. China