Comparative Study on the Effects of O<sub>2</sub> Flow Rate on As-Deposited Polycrystalline IAZO Films-Reference-Cited by-同舟云学术

Comparative Study on the Effects of O₂ Flow Rate on As-Deposited Polycrystalline IAZO Films

Published:2023-11-17 Issue:12 Volume:1 Page:3348-3358
ISSN:2771-9545
Container-title:ACS Applied Engineering Materials
language:en
Short-container-title:ACS Appl. Eng. Mater.

Author:

Ahmad Dilshad¹²^ORCID,Zhang Jing³,Xu Jing¹²,Luo Jun¹²

Affiliation:

1. School of Integrated Circuits, University of Chinese Academy of Sciences (UCAS), Beijing 100049, China

2. State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences (IMECAS), Beijing 100029, China

3. Department of Microelectronics, North China University of Technology, Beijing 100144, China

Funder

Special Project for Research and Development in Key areas of Guangdong Province

Youth Innovation Promotion Association of the Chinese Academy of Sciences

National Natural Science Foundation of China

Institute of Microelectronics of the Chinese Academy of Sciences

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaenm.3c00615

Reference53 articles.

1. Thin-Film Transistor Fabricated in Single-Crystalline Transparent Oxide Semiconductor

2. Electronic Defects in Amorphous Oxide Semiconductors: A Review

3. MOSFET Scaling Trends, Challenges, and Key Associated Metrology Issues Through the End of the Roadmap

4. Zinc oxide incorporated indium tungsten oxide amorphous thin films for thin film transistors applications

5. Alloy-Electrode-Assisted High-Performance Enhancement-Type Neodymium-Doped Indium-Zinc-Oxide Thin-Film Transistors on Polyimide Flexible Substrate

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