Solubility Change Behavior of Fluoroalkyl Ether-Tagged Dendritic Hexaphenol under Extreme UV Exposure-Reference-Cited by-同舟云学术

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Solubility Change Behavior of Fluoroalkyl Ether-Tagged Dendritic Hexaphenol under Extreme UV Exposure

Published:2024-08-20 Issue:35 Volume:9 Page:37365-37373
ISSN:2470-1343
Container-title:ACS Omega
language:en
Short-container-title:ACS Omega

Author:

Oh Hyun-Taek¹,Kim Gayoung²,Jung Seok-Heon¹,Ku Yejin²,Lee Jin-Kyun¹²^ORCID,Kim Kanghyun³,Park Byeong-Gyu⁴,Lee Sangsul⁴,Koh Chawon⁵⁶,Nishi Tsunehiro⁵,Kim Hyun-Woo⁵

Affiliation:

1. Department of Polymer Science and Engineering, Inha University, Incheon 22212, Republic of Korea

2. Program in Environmental and Polymer Engineering, Inha University, Incheon 22212, Republic of Korea

3. Department of Mechanical Engineering, POSTECH, Pohang 37673, Republic of Korea

4. Pohang Accelerator Laboratory, POSTECH, Pohang 37673, Republic of Korea

5. Samsung Electronics Co., Ltd., Semiconductor R&D Center, Suwon 18448, Republic of Korea

6. Department of Materials Science and Engineering, Yonsei University, Seoul 03722, Republic of Korea

Funder

Samyang Yangyoung Foundation

Samsung Research Funding and Incubation Center for Future Technology

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsomega.4c05535

Reference49 articles.

1. Turning Potential into Realities: The Invention of the Integrated Circuit (Nobel Lecture)

2. Integrated Circuit and Silicon Valley

3. Imprints offer Moore

4. Fundamental Principles of Optical Lithography

5. EUV Photoresists: A Progress Report and Future Prospects

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