Airborne contamination of a chemically amplified resist. 1. Identification of problem-Reference-Cited by-同舟云学术

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Airborne contamination of a chemically amplified resist. 1. Identification of problem

Published:1993-03-01 Issue:3 Volume:5 Page:348-356
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

MacDonald Scott A.,Hinsberg William D.,Wendt H. Russell,Clecak Nicholas J.,Willson C. Grant,Snyder Clinton D.

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm00027a018

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