Plasma-Enhanced Atomic Layer Deposition of Titanium Oxynitride (TiOxNy) Thin Films and Their Neuromorphic Applications

Author:

Annamalai Soundararaj1,Dayal Gopalakrishnan1ORCID,Gondhalekar Jayesh1ORCID,Jinesh Kochupurackal B.1ORCID

Affiliation:

1. Electronic Materials and Devices Laboratory (EMERALD), Department of Physics, Indian Institute of Space-Science and Technology (IIST), Thiruvananthapuram, Kerala 695547, India

Funder

Department of Science and Technology, Ministry of Science and Technology, India

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials

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