Patterning of Complex, Nanometer-Scale Features in Wide-Area Gold Nanoplasmonic Structures Using Helium Focused Ion Beam Milling
Author:
Affiliation:
1. Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta T6G 1H9, Canada
2. nanoFAB Centre, University of Alberta, Edmonton, Alberta T6G 1H9, Canada
Funder
Natural Sciences and Engineering Research Council of Canada
Alberta Innovates
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.1c09295
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