Atomic Layer Deposition: An Overview
Author:
Affiliation:
1. Department of Chemistry and Biochemistry and Department of Chemical and Biological Engineering, University of Colorado, Boulder, Colorado 80309
Publisher
American Chemical Society (ACS)
Subject
General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cr900056b
Reference226 articles.
1. International Technology Roadmap for Semiconductors, 2007 Edition,http://www.itrs.net/.
2. Thin film atomic layer deposition equipment for semiconductor processing
3. Atomic Layer Deposition of AlO[sub x] for Thin Film Head Gap Applications
4. Oxygen diffusion barrier properties of transparent oxide coatings on polymeric substrates
5. Surface Chemistry for Atomic Layer Growth
Cited by 4804 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Enhancing performance of lower-temperature solid oxide fuel cell cathodes through surface engineering;Progress in Materials Science;2025-01
2. Inorganic layered polymeric membranes: Highly-ordered porous ceramics for surface engineering of polymeric membranes;Separation and Purification Technology;2024-12
3. Plasma-enhanced atomic layer deposition of silicon nitride thin films with different substrate biasing using Diiodosilane precursor;Materials Science in Semiconductor Processing;2024-12
4. Control polarity of gallium nitride on Si (1 1 1) using atomic layer annealing and thermal atomic layer deposition;Applied Surface Science;2024-12
5. Nano Horizons: Exploring the untapped power of two-Dimensional materials;Materials Science and Engineering: B;2024-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3