Affiliation:
1. Chengdu Technological University, Chengdu, 610031, PR China
Abstract
Micro-machined gyroscope is an important inertial sensor, which has the advantages of high integration, small size and low power consumption. However, due to the temperature sensitivity of silicon and electronic devices, the bias and scale factor of micro-machined gyroscopes have temperature
drift, which limits their engineering application the relatively large process error of micro-machining makes the frequency mismatch between driving mode and detection mode of micro-machined gyroscope, which not only deteriorates the mechanical sensitivity of the gyroscope, but also causes
the frequency mismatch between driving mode and detection mode, it also leads to the quadrature error of driving coupling in gyro detection mode. Based on this, firstly, the relationship between the bias factor and the scale factor of MEMS gyroscope and its dynamic and electrical parameters
is analyzed. Secondly, a self-calibration capacitance detection scheme based on triangular-electrode based (TEB) is proposed, and the temperature effect of the scheme is analyzed. Finally, the simulation results show that the temperature coefficient of the scale factor decreases from −8845
ppm/°C to 1660 ppm/°C when the temperature range is from −10 °C to 60 °C, the bias temperature coefficient decreased from −0.97°/s/°C to −0.42°/s/°C. The experimental results show that the scheme effectively reduces the temperature sensitivity
of the bias and scale factor of the gyroscope.
Publisher
American Scientific Publishers
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