Alloying and selenization of Cu-In stacked layers evaporated onto large areas

Abstract

ABSTRACTIn this work, Cu and In thin films, as precursors for CuInSe2 (CIS) formation, have been deposited on glass substrate up to 30 × 30 cm2 area using an electron beam evaporator in sequential processes. In order to obtain a similar global composition, three types of sequential processes of evaporation: A) Cu/In/Cu/In, B) Cu/In/Cu/In/Cu/In and C) In/Cu/In/Cu have been tested. As-grown thin films were studied at room temperature and after 120° C annealing. XRD analysis of these films showed mainly the CuIn2−x (0≤ × ≤ 1) phase at room temperature, and Cu11In9 after annealing at 120° C. After alloying, the films were selenized at temperature between 250° and 400° C in vacuum using elemental selenium vapour. XRD of the selenized thin films corresponding to In/Cu/In/Cu sequence and previously annealing at 120° C, showed the major presence of the polycrystalline chalcopyrite structure CuInSe2 with preferential orientation (112) plane at temperature as low as 250° C. From SEM studies and profilometer measurements a decrease in the mean roughness could be observed after annealing at 120° C. In contrast the resistivity of the films increased.