Abstract
The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non-linear control, insufficient mirror size and small angular travel. In this paper, a novel, particularly efficient ScAlN-based piezoelectric MEMS mirror with a pupil size of 10 mm is presented. The MEMS mirror consists of a reflection mirror plate, four meandering springs with mechanical rotation transformation, and eight right-angle trapezoidal actuators designed in Union Jack-shaped form. Theoretical modeling, simulations and comparative analysis have been investigated for optimizing two different device designs. For Device A with a 1 mm-length square mirror, the orthogonal and diagonal static tilting angles are ±36.2°@200 VDC and ±36.2°@180 VDC, respectively, and the dynamic tilting angles increases linearly with the driving voltage. Device B with a 10 mm-length square mirror provides the accessible tilting angles of ±36.0°@200 VDC and ±35.9°@180 VDC for horizontal and diagonal actuations, respectively. In the dynamic actuation regime, the orthogonal and diagonal tilting angles at 10 Hz are ±8.1°/Vpp and ±8.9°/Vpp, respectively. This work confirmed that the Union Jack-shaped arrangement of trapezoidal actuators is a promising option for designing powerful optical devices.
Funder
National Natural Science Foundation of China
Major Technology Innovation of Hubei Province
Science and Technology Research Program from Educational Committee of Hubei Province
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Cited by
6 articles.
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