A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations-Reference-Cited by-同舟云学术

A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations

Published:2023-07-12 Issue:7 Volume:14 Page:1408
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Zhai Zhaoyang¹²,Xiong Xingyin¹,Ma Liangbo¹²^ORCID,Wang Zheng³,Wang Kunfeng¹²,Wang Bowen¹²,Zhang Mingjiang⁴^ORCID,Zou Xudong¹²⁴^ORCID

Affiliation:

1. The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China

2. School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

3. QiLu Aerospace Information Research Institute, Jinan 250101, China

4. Key Laboratory of Advanced Transducers and Intelligent Control System of Ministry of Education, Taiyuan University of Technology, Taiyuan 030024, China

Abstract

This paper presents a scale factor calibration method based on virtual accelerations generated by electrostatic force. This method uses a series of voltage signals to simulate the inertial forces caused by the acceleration input, rather than frequent and laborious calibrations with high-precision instruments. The error transfer model of this method is systematically analyzed, and the geometrical parameters of this novel micromachined resonant accelerometer (MRA) are optimized. The experimental results demonstrate that, referring to the traditional earth’s gravitational field tumble calibration method, the error of the scale factor calibration is 0.46% within ±1 g by using our method. Moreover, the scale factor is compensated by virtual accelerations. After compensation, the maximum temperature drift of the scale factor decreases from 2.46 Hz/g to 1.02 Hz/g, with a temperature range from 40 °C to 80 °C.

Funder

National Key Research and Development Program of China

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Link

https://www.mdpi.com/2072-666X/14/7/1408/pdf

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