Silicon-Based Sensors for Biomedical Applications: A Review

Author:

Xu Yongzhao,Hu Xiduo,Kundu Sudip,Nag Anindya,Afsarimanesh Nasrin,Sapra Samta,Mukhopadhyay Subhas Chandra,Han TaoORCID

Abstract

The paper highlights some of the significant works done in the field of medical and biomedical sensing using silicon-based technology. The use of silicon sensors is one of the pivotal and prolonged techniques employed in a range of healthcare, industrial and environmental applications by virtue of its distinct advantages over other counterparts in Microelectromechanical systems (MEMS) technology. Among them, the sensors for biomedical applications are one of the most significant ones, which not only assist in improving the quality of human life but also help in the field of microfabrication by imparting knowledge about how to develop enhanced multifunctional sensing prototypes. The paper emphasises the use of silicon, in different forms, to fabricate electrodes and substrates for the sensors that are to be used for biomedical sensing. The electrical conductivity and the mechanical flexibility of silicon vary to a large extent depending on its use in developing prototypes. The article also explains some of the bottlenecks that need to be dealt with in the current scenario, along with some possible remedies. Finally, a brief market survey is given to estimate a probable increase in the usage of silicon in developing a variety of biomedical prototypes in the upcoming years.

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference108 articles.

1. MEMS for Biomedical Applications;Bhansali,2012

2. High-sensitivity radio frequency noncontact sensing and accurate quantification of uric acid in temperature-variant aqueous solutions

3. Semiconductor Sensors;Sze,1994

4. Sensitivity Analysis of Micro-Mass Optical MEMS Sensor for Biomedical IoT Devices;Serene,2019

5. High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching

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