Probing Surface Information of Alloy by Time of Flight-Secondary Ion Mass Spectrometer

Abstract

In recent years, time of flight-secondary ion mass spectrometer (ToF-SIMS) has been widely employed to acquire surface information of materials. Here, we investigated the alloy surface by combining the mass spectra and 2D mapping images of ToF-SIMS. We found by surprise that these two results seem to be inconsistent with each other. Therefore, other surface characteristic tools such as SEM-EDS were further used to provide additional supports. The results indicated that such differences may originate from the variance of secondary ion yields, which might be affected by crystal orientation.