Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II

Published:2024-05-21 Issue:6 Volume:15 Page:667
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Wang Weidong¹^ORCID,Ruan Yong²,Zhou Zaifa³^ORCID,Liu Min¹^ORCID

Affiliation:

1. School of Mechano-Electronic Engineering, Xidian University, Xi’an 710071, China

2. Department of Precision Instruments, Tsinghua University, Beijing 100084, China

3. School of Electronic Science and Technology, Southeast University, Nanjing 210096, China

Abstract

Microelectromechanical system (MEMS) sensors are a miniaturized sensor technology that integrates sensors with microelectronic components using microelectromechanical system manufacturing technology [...]

Publisher

MDPI AG

Link

https://www.mdpi.com/2072-666X/15/6/667/pdf

Reference23 articles.

1. Review of device and reliability physics of dielectrics in electrostatically driven MEMS devices;Webster;IEEE Trans. Device Mater. Reliab.,2009

2. Zhu, J., Liu, X., Shi, Q., He, T., Sun, Z., Guo, X., and Lee, C. (2019). Development trends and perspectives of future sensors and MEMS/NEMS. Micromachines, 11.

3. Liu, Y., Jiang, X., Yang, H., Qin, H., and Wang, W. (2023). Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review. Micromachines, 14.

4. Design and analysis of MEMS based piezoresistive pressure sensor for sensitivity enhancement;Nallathambi;Mater. Today Proc.,2018

5. Design and fabrication of a high performance resonant MEMS temperature sensor;Kose;J. Micromech. Microeng.,2016

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP