1. Xiangfu Laboratory, Jiashan 314100, China
2. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
3. College of Chemistry and Materials Science, Shanghai Normal University, Shanghai 200234, China
4. 2020 X-Lab, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
5. School of Microelectronics, Shanghai University, Shanghai 200444, China
6. Shanghai Si-Gene Biotech Co., Ltd., Shanghai 201899, China