Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress
Author:
Nur-E-Alam Mohammad123, Maurya Devendra Kumar4, Yap Boon Kar15, Rajabi Armin1ORCID, Doroody Camellia15ORCID, Bin Mohamed Hassan15ORCID, Khandaker Mayeen Uddin6ORCID, Islam Mohammad Aminul7ORCID, Kiong Tiong Sieh15
Affiliation:
1. Institute of Sustainable Energy, Universiti Tenaga Nasional, Jalan IKRAM-UNITEN, Kajang 43000, Selangor, Malaysia 2. School of Science, Edith Cowan University, 270 Joondalup Drive, Joondalup, WA 6027, Australia 3. School of Engineering and Technology, Central Queensland University Australia, Melbourne, VIC 3000, Australia 4. National Centre for Flexible Electronics, Indian Institute of Technology Kanpur, Kanpur 208016, India 5. College of Engineering, Universiti Tenaga Nasional, Jalan IKRAM-UNITEN, Kajang 43000, Selangor, Malaysia 6. Centre for Applied Physics and Radiation Technologies, School of Engineering and Technology, Sunway University, Bandar Sunway 47500, Selangor, Malaysia 7. Department of Electrical Engineering, Faculty of Engineering, University of Malaya, Kuala Lumpur 50603, Selangor, Malaysia
Abstract
In the last several decades, metal oxide thin films have attracted significant attention for the development of various existing and emerging technological applications, including pH sensors. The mandate for consistent and precise pH sensing techniques has been increasing across various fields, including environmental monitoring, biotechnology, food and agricultural industries, and medical diagnostics. Metal oxide thin films grown using physical vapor deposition (PVD) with precise control over film thickness, composition, and morphology are beneficial for pH sensing applications such as enhancing pH sensitivity and stability, quicker response, repeatability, and compatibility with miniaturization. Various PVD techniques, including sputtering, evaporation, and ion beam deposition, used to fabricate thin films for tailoring materials’ properties for the advanced design and development of high-performing pH sensors, have been explored worldwide by many research groups. In addition, various thin film materials have also been investigated, including metal oxides, nitrides, and nanostructured films, to make very robust pH sensing electrodes with higher pH sensing performance. The development of novel materials and structures has enabled higher sensitivity, improved selectivity, and enhanced durability in harsh pH environments. The last decade has witnessed significant advancements in PVD thin films for pH sensing applications. The combination of precise film deposition techniques, novel materials, and surface functionalization strategies has led to improved pH sensing performance, making PVD thin films a promising choice for future pH sensing technologies.
Funder
Tenaga Nasional Berhad (TNB) and UNITEN through the Ministry of Higher Education of Malaysia BOLD Refresh Postdoctoral Fellowships Dato’ Low Tuck Kwong International Energy Transition
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
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