A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor

Author:

Lee Junwoo,Choi Wook,Yoo Yong,Hwang Kyo,Lee Sang-Myung,Kang Sungchul,Kim Jinseok,Lee Jeong

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

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