1. Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3. School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
4. College of Materials Science and Opto-Electronics Technology, University of Chinese Academy of Sciences, Beijing 100049, China
5. School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China
6. Key Laboratory of Semiconductor Materials Science, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
7. State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
8. Beijing Academy of Quantum Information Sciences, Beijing 100193, China
9. Beijing Engineering Research Center of Semiconductor Micro-Nano Integrated Technology, Beijing 100083, China