1. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China
2. Department of Mechanical Engineering, City University of Hong Kong, Kowloon, Hong Kong SAR 999077, China
3. Nano-Manufacturing Laboratory (NML), City University of Hong Kong Shenzhen Research Institute, Shenzhen 518057, China
4. Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong SAR 999077, China