1. School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
2. Xi’an Simitech Co., Ltd., Xi’an 710086, China
3. Aviation Gyro (Xi’an) Photoelectricity Technology Co., Ltd., Xi’an 710086, China
4. Beijing Academy of Quantum Information Sciences, Beijing 100193, China
5. State Key Laboratory for Manufacturing Systems Engineering, and International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an 710049, China
6. School of Integrated Circuits, and Frontier Science Center for Quantum Information, Tsinghua University, Beijing 100084, China