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XPS analysis of FIB-milled Si

  • Published:2002 Issue:12 Volume:33 Page:907-913
  • ISSN:0142-2421
  • Container-title:Surface and Interface Analysis
  • language:en
  • Short-container-title:Surf. Interface Anal.

Author:

Ferryman Amy C.,Fulghum Julia E.,Giannuzzi Lucille A.,Stevie Fred A.

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Practical guides for x-ray photoelectron spectroscopy: Use of argon ion beams for sputter depth profiling and cleaning;Journal of Vacuum Science & Technology A;2024-07-22

2. Cryo-EXLO Manipulation of FIB Specimens for Cryo-TEM;Microscopy and Microanalysis;2023-01-09

3. Theory and New Applications ofEx SituLift Out;Microscopy and Microanalysis;2015-07-16

4. TOF SIMS analyses of stray Ga during FIB milling;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2013-11

5. XPS spectromicroscopy: exploiting the relationship between images and spectra;Surface and Interface Analysis;2008
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