A study on the innovative microlens projection lithography applied to the production of microstructures
Author:
Publisher
Wiley
Subject
Polymers and Plastics
Reference6 articles.
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3. Microlens lithography: a new approach for large display fabrication;Volkel;Microelectron. Eng.,1996
4. Fabrication of microneedle array using LIGA and hot embossing process;Moon;Microsyst. Technol.,2005
5. Design, fabrication and testing of microlens arrays for sensors and microsystem;Nussbaum;Pure Appl. Opt.,1997
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