Functionalization of Oxide‐Free Silicon Surfaces for Biosensing Applications
Author:
Affiliation:
1. Technische Universität Berlin Department of Biotechnology Chair of Bioprocess Engineering Ackerstraße 76 13355 Berlin Germany
2. IHP–Leibniz‐Institut für innovative Mikroelektronik Im Technologiepark 25 15236 Frankfurt (Oder) Germany
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/admi.202100927
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1. Recent Advances in Silicon Nanowire Biosensors: Synthesis Methods, Properties, and Applications
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