1. FHNW University of Applied Sciences and Arts Northwestern Switzerland; School of Engineering; Institute of Polymer Nanotechnology (INKA); 5210 Windisch Switzerland
2. Paul Scherrer Institut (PSI); Laboratory for Micro- and Nanotechnology (LMN); 5232 Villigen PSI Switzerland
3. Technical University of Denmark (DTU); Department of Micro- and Nanotechnology; 2800 Kgs. Lyngby Denmark
4. Dortmund University of Technology; Faculty of Electrical Engineering; AG Mikrostrukturtechnik; 44227 Dortmund Germany