1. Chongqing Key Laboratory of Micro‐Nano Systems and Intelligent Transduction Collaborative Innovation Center on Micro‐Nano Transduction and Intelligent Eco‐Internet of Things Chongqing Key Laboratory of Colleges and Universities on Micro‐Nano Systems Technology and Smart Transducing National Research Base of Intelligent Manufacturing Service Chongqing Technology and Business University Nan'an District Chongqing 400067 China
2. Department of Microsystems (IMS) Faculty of Technology Natural Sciences and Maritime Sciences University of South‐Eastern Norway Postboks 235 Kongsberg 3603 Norway
3. State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology Xi'an Jiaotong University Xi'an 710049 China
4. Department of Energy and Process Engineering Norwegian University of Science and Technology Trondheim 7491 Norway
5. Biophysics and Medical Technology Department of Physics Norwegian University of Science and Technology Trondheim NO‐7491 Norway