Piezoelectric properties of thin AlN layers for MEMS application determined by piezoresponse force microscopy
Author:
Publisher
Wiley
Subject
Condensed Matter Physics
Reference12 articles.
1. , and , Microsensors MEMS and Smart Devices (Wiley, 2001).
2. Growth and applications of Group III-nitrides
3. Effect of substrate composition on the piezoelectric response of reactively sputtered AlN thin films
4. Influence of oxygen and argon on the crystal quality and piezoelectric response of AlN sputtered thin films
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